Ideally, the use of optical or other non-contact inspection techniques to measure complex micromachined parts may be the best approach, but this is often not easy to achieve. The advantage of the optical measuring system is that the measuring speed is fast and does not cause deformation of the part, but it also has certain limitations, such as the visible edge of the workpiece often cannot reflect the occluded part. In addition, optical measurement systems are generally unable to determine three-dimensional shape positional accuracy such as parallelism, verticality, cylindricity, flatness, and the like.
However, by combining the advantages of several sensing technologies to create a single measurement system, all key parameters of complex parts can be measured in a single installation. These multi-sensor measurement systems typically include non-contact sensors—video, white light, or laser probes—for the measurement of workpiece surfaces and boundaries, and trigger and scanning probes that measure non-contact detection devices. Position, such as a deep stepped hole.
Detection microscale
Traditional measurement techniques, such as the touch probes of coordinate measuring machines, are continually being adapted to the changing needs. Today's sensors have different triggering forces, different lengths of probes, and probes of different sizes and materials. However, when the scale becomes smaller, there is a physical limit, and the size of the probe is small enough to ensure reliable triggering. For example, a thin probe may bend and deform before triggering, resulting in an incorrect indication of the position of the surface of the workpiece: either a long probe may “tremble†(touch the edge of the hole or slot) and send a sample, but actually The upper probe does not touch the wall of the hole at the position to be measured. Due to advances in manufacturing technology and the use of electrical discharge machining (EDM), many microstructures (such as microvias, ports) have been fabricated, but these microstructures are difficult to measure. In some cases, the tip size or probe length of the touch probe may make triggering measurements completely impossible. Triggering measurement techniques may not be appropriate when measuring small grooves, orifices, or orifice slopes because conventional probes must be skewed to a certain position before they can be sampled.
In machining, the use of the probe can usually be divided into two types. The first probe is attached to the original machine as an accessory, also known as the spindle-mounted probe: the second probe is completely set in Inside the machine, it is called an integrated probe. The latter can be folded back so that it does not interfere with the tool system and does not require a mechanism change. The machine-integrated probe is reliable and easy to use, and it also reduces the troubles such as handling cable, anti-electromagnetic interference and power supply.
When a conventional machine tool is equipped with an integrated probe, it becomes a machine that can sense and reflect its environmental state. Today, machine tools with this type of functionality are valuable in today's increasingly smaller and more diverse parts.
Figure 1 The probe integrated in the machine can be folded back when not in use.
Figure 2 Datron machine with Renishaw TP20 probe for constant depth cutting on round workpieces
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